Revamp of 20-Year-Old Loadport

Our team redesigned a 20-year-old load port using modern technology and made it cost-competitive. This solution aided in the following areas:

• a wafer environment that is always clean
• cassette transfer using Isolation Technology (SMIF interface while cassette transfer)
• redesigning and changing component sources reduced costs by 30%.
• adjustable floor mount base for simple installation
• modern design that complies with semi-standards